OFF-SITE PRODUCTION
Off-site production in the semiconductor industry involves the manufacturing and preparation of essential materials and components at a location separate from the main production facility, ensuring a streamlined and efficient supply chain. This approach is crucial for handling specialized processes like bulk filling, cylinder filling, and UHP (Ultra High Purity) gas handling.
Bulk filling
Bulk filling entails the large-scale transfer of gases or chemicals into storage tanks or containers, which are then transported to semiconductor fabs, ensuring a continuous and reliable supply.
Parker’s Non-Conductive Thermoplastic Hoses protect against electrical interference and static discharge, crucial for semiconductor integrity. Industrial rubber hoses handle aggressive chemicals and acids safely and efficiently. LF Push-in Fittings ensure secure connections, maintaining fluid and gas purity and reliability. Double Ferrule Tube Fittings provide leak-free performance and are suitable for high-pressure applications, ensuring dependable connections during bulk filling.
Cylinder Filling
Cylinder filling involves the precise filling of high-pressure gas cylinders with specific gases used in semiconductor processes, requiring meticulous control to maintain purity and pressure standards.
Parker’s industrial rubber hoses securely transfer acids and chemicals, maintaining the purity of substances used in semiconductor manufacturing. Non-Conductive Thermoplastic Hoses ensure safe handling of gases and fluids without electrical conductivity, enhancing safety in sensitive environments. Plastic Push-in Fittings offer versatile, reliable connections for air and gas lines, ensuring efficient cylinder filling, while Stainless Steel Push-in Fittings provide robust, corrosion-resistant connections, crucial for maintaining gas and chemical purity.
UHP Gas Handling
UHP (Ultra High Purity) gas handling involves the delivery and management of gases with extremely low impurity levels, often in the parts per billion (ppb) range, to prevent contamination and ensure the integrity of semiconductor devices.
In this process, Stainless Steel Bulk Bellow Valves ensure leak-tight performance and durability under high pressure, while UHP Bulk Diaphragm Valves provide precise control and maintain the ultra-high purity of gases, preventing any contamination. Stainless Steel Push-in Fittings offer secure and contamination-free connections, essential for maintaining system integrity. XXL seals from Parker deliver outstanding sealing capabilities with high chemical and thermal resistance, ensuring reliable performance in demanding UHP gas handling environments.
BULK DELIVERY
Bulk delivery in the semiconductor industry ensures that large volumes of high-purity fluids and gases are transported from production sites to semiconductor fabrication facilities. Parker’s range of UHP fittings and valves in PFA / PTFE and in stainless steel ensure safe and reliable conveyance of fluids and gases throughout their journey to the semiconductor fabrication plant.
Bulk delivery of DI Water
Bulk delivery of DI (Deionized) water involves transporting large volumes of purified water from off-site production facilities to the semiconductor fab. This water must be free from impurities to prevent contamination during the manufacturing process.
The use of UHP PFA Tube Fittings ensures secure, leak-free connections that maintain the integrity of the DI water throughout the delivery system. UHP Fluoropolymer (PFA) Valves provide reliable flow control with excellent chemical resistance, further safeguarding the purity of the water. Fluoropolymer (PFA) Tubing offers superior chemical inertness and flexibility, making it ideal for transporting DI water without risk of leaching contaminants. The Evolve™ Semiconductor Seal Ring enhances the system's overall reliability by providing high-performance sealing solutions that prevent leaks and maintain ultra-high purity standards.
Bulk delivery of UHP Gas
For UHP (Ultra High Purity) gases, bulk delivery typically involves the transportation of gases in high-pressure cylinders or specialized bulk trailers. These gases must be maintained at ultra-high purity levels throughout the delivery process to ensure they meet stringent quality standards.
UHP Stainless Steel Fittings ensure leak-free connections, maintaining gas integrity. UHP Stainless Steel Pressure Regulators provide precise pressure control, crucial for gas consistency and quality. Stainless Steel Bulk Bellow Valves offer reliable flow control with minimal contamination, preserving gas purity. Parker's Bestobell cryogenic valves are designed for handling cryogenic fluids with exceptional reliability and performance. They ensure a contaminant-free delivery system, complementing UHP Bulk Diaphragm Valves that meet high purity standards.
Bulk delivery of Chemical Fluids
Bulk delivery of chemical fluids involves the transportation of large quantities of chemicals in specialized containers or tankers. These chemicals are used in various semiconductor processes, and their purity and concentration must be precisely controlled.
PTFE Hose and Tubing offers exceptional chemical resistance and purity, ensuring fluids remain uncontaminated during transport. UHP PFA Fittings maintain ultra-high purity, preventing contamination and preserving chemical integrity. UHP Valves provide precise control over high-purity chemical flow, ensuring accurate delivery and preventing impurities. UHP PFA Pressure Vessels offer secure storage and transport, maintaining chemical purity and stability. These products ensure high purity and reliability in semiconductor manufacturing.
ON-SITE PRODUCTION
On-site production in the semiconductor industry involves the direct management and utilization of essential materials and components within the manufacturing facility, ensuring immediate availability and precise control over production processes. This approach is critical for applications like DI (Deionized) water handling, UHP (Ultra High Purity) gas handling, and chemical fluids handling.
DI Water Handling
DI water handling requires meticulous management to prevent contamination. Parker’s UHP PFA fittings ensure ultra-high purity connections, minimizing the risk of contamination during water transfer. Pleated Membrane Filter Cartridges provide superior filtration, effectively removing contaminants to maintain the highest water quality standards. UHP PTFE fluoropolymer pressure regulators offer precise pressure control, safeguarding equipment and ensuring consistent water quality. Additionally, UHP PFA manual needle valves allow for exact flow control, crucial for the precise requirements of semiconductor manufacturing processes.
Chemical Fluids Handling
Chemical fluids handling also relies on Parker’s UHP PFA fittings, UHP PTFE pressure regulators, and UHP valves and valve systems to ensure the safe and accurate delivery of chemicals used in semiconductor processes.
UHP PFA fittings offer exceptional chemical resistance and purity, reducing contamination risks in semiconductor applications. UHP PTFE pressure regulators ensure precise control and consistent chemical delivery. UHP valves and valve systems handle high-purity chemicals with minimal particle generation and excellent leak integrity, enhancing safety and efficiency in semiconductor manufacturing.
UHP Gas Handling
UHP gas handling is crucial for maintaining the purity of gases used in semiconductor production. Parker’s Bestobell cryogenic valves range complements this process by providing exceptional performance in extreme conditions.
Alongside Parker’s UHP stainless steel fittings, UHP stainless steel pressure regulators, and UHP bulk diaphragm valves, the cryogenic valves ensure leak-tight performance and precise control. The UHP stainless steel fittings deliver robust and contamination-free connections, while the UHP stainless steel pressure regulators maintain consistent gas delivery with precise pressure control. The stainless steel bulk bellow valves guarantee reliable, leak-tight operation, and nitrogen gas generators ensure a steady supply of UHP nitrogen.
STORAGE
Once on-site, fluids and gases are stored in specialized tanks designed to maintain their purity and stability. The integrity and purity of the fluids and gases is crucial for maintaining the high standards of semiconductor manufacturing.
Storage of DI water
Once delivered, DI (Deionized) water is stored in specially designed tanks made from materials that prevent contamination, such as high-purity plastics. These tanks are equipped with systems to maintain the purity and prevent microbial growth.
Storage of UHP Gas
Once delivered, DI (Deionized) water is stored in specially designed tanks made from materials that prevent contamination, such as high-purity plastics. These tanks are equipped with systems to maintain the purity and prevent microbial growth.
Storage of Chemical Fluids
Chemical fluids are stored in tanks designed to handle the specific properties of each chemical, such as corrosiveness or reactivity. These tanks are often made from materials like PTFE or PFA and are equipped with monitoring systems to ensure the chemical's stability and purity.
